Vacuum UV

HORIBA Scientific is providing a wide offer of vacuum monochromators, spectrographs and accessories to work in a large spectral range from a few nanometers to a few hundred. Based on toroïdal, spherical or plane diffraction gratings, our monochromators provide an unequal throughput and relative high spectral resolution for soft X-ray, EUV, FUV and DUV applications. They are specially recommended for applications such as EUV reflectometry, X-ray Photoemission Spectroscopy (XPS), EUV fluorescence, EUV lithography, Plasma diagnostic or High Harmonic Generation.

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WHAT ARE VACUUM UV INSTRUMENTS CAPABLE OF?

  • HV 10-6 & UHV 10-10 mbar
  • 4 to 400 nm

WHAT ARE THE MAIN APPLICATIONS?

  • Photoelectron spectroscopy
  • EUV spectroscopy

Instruments

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Monochromators and Systems

Synchrotron Beamlines

Monochromators and Systems

Synchrotron Beamlines

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